1 December 2005 Microfabricated clamps for high-precision passive alignment and packaging of optical fibres in optoelectronics devices
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Proceedings Volume 6019, Passive Components and Fiber-based Devices II; 601909 (2005) https://doi.org/10.1117/12.637146
Event: Asia-Pacific Optical Communications, 2005, Shanghai, China
Abstract
A novel micro-mechanical structure has been put forwarded. It is designed for high precision passive alignment and packaging of optical fibres in optoelectronics devices. The electroplated nickel micro clamp has been fabricated above the silicon V grooves. The clamps, work together with the V groove, fix the optical fibers with high precision for optical alignment when the fibers are inserted into the grooves. The fabrication of the micro clamp involves only one more photolithography and electroplating process. two single mode optical fibers have been fixed into the silicon V-groove by the nickel clamp; the measured insertion loss is lower than 0.1dB. The proposed nickel micro clamp is proved to be a low cost, high performance approach that could be widely applied in passive alignment and packaging of fiber in opto-electronics devices.
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Xuhan Dai, Xuhan Dai, Xiaolin Zhao, Xiaolin Zhao, Guifu Ding, Guifu Ding, Hong Wang, Hong Wang, Bingchu Cai, Bingchu Cai, } "Microfabricated clamps for high-precision passive alignment and packaging of optical fibres in optoelectronics devices", Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 601909 (1 December 2005); doi: 10.1117/12.637146; https://doi.org/10.1117/12.637146
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