Design and calibration of large dynamic range optical metrology systems

John E. Greivenkamp

doi:10.1117/12.666804

9 December 2005 Design and calibration of large dynamic range optical metrology systems

John E. Greivenkamp

Author Affiliations +

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 602403 (2005) https://doi.org/10.1117/12.666804
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

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John E. Greivenkamp, John E. Greivenkamp, } "Design and calibration of large dynamic range optical metrology systems", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602403 (9 December 2005); doi: 10.1117/12.666804; https://doi.org/10.1117/12.666804

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