On-line calibration of phase-shifter in phase-shifting interferometer

Lei Chen; Yingchun Li; Fei Liu

doi:10.1117/12.666845

9 December 2005 On-line calibration of phase-shifter in phase-shifting interferometer

Lei Chen, Yingchun Li, Fei Liu

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 602412 (2005) https://doi.org/10.1117/12.666845
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Phase-shifting interferometry (PSI) as a high accuracy measurement method is widely used in modern measurements. Accurate calibration of phase-shifter is very important if good measurement results are expected from PSI. A new method of on-line calibration for phase-shifter is presented. By constructing a mathematic model for intensity of interferogram associating with the phase-shifter's characters, the coefficients of the function can be solved by introducing Damped-Least-Square methods. Results of computer simulation show a high accuracy after several fast iterations. Experimental results are presented for on-line phase-shift calibration.

Citation Download Citation

Lei Chen, Yingchun Li, and Fei Liu "On-line calibration of phase-shifter in phase-shifting interferometer", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602412 (9 December 2005); https://doi.org/10.1117/12.666845

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