9 December 2005 Developing of in-suit long trance profiler for testing slope error of aspherical optical elements
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Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60241M (2005) https://doi.org/10.1117/12.666867
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
Profile error of super smooth surface of optical elements at x-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal, spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle, optical system, mechanical constructions, DC serve motor control system, array detector, data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy, low cost, multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
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Changxin Zhou, Hengshun Li, Chukang Chen, Chengzhi Zhou, "Developing of in-suit long trance profiler for testing slope error of aspherical optical elements", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60241M (9 December 2005); doi: 10.1117/12.666867; https://doi.org/10.1117/12.666867
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