Design, fabrication, and characterization of an ultraviolet silicon sensor

D. Berman-Mendoza; M. Aceves-Mijares; L. R. Berriel-Valdos; Z. Yu; C. Falcony; C. Domínguez-Horna; Jorge Pedraza

doi:10.1117/12.666968

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9 December 2005 Design, fabrication, and characterization of an ultraviolet silicon sensor

D. Berman-Mendoza, M. Aceves-Mijares, L. R. Berriel-Valdos, Z. Yu, C. Falcony, C. Domínguez-Horna, Jorge Pedraza

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Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60242L (2005) https://doi.org/10.1117/12.666968
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

In this work a Silicon/Silicon Rich Oxide (SRO) Ultraviolet detector is designed, fabricated and characterized. This device increases the silicon detection range to the ultraviolet region (200-300nm). Besides the fabrication process of this detector is compatible with standard silicon technology that makes it cheaper than commercial UV detectors.

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D. Berman-Mendoza, M. Aceves-Mijares, L. R. Berriel-Valdos, Z. Yu, C. Falcony, C. Domínguez-Horna, and Jorge Pedraza "Design, fabrication, and characterization of an ultraviolet silicon sensor", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242L (9 December 2005); https://doi.org/10.1117/12.666968

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