9 December 2005 Design and fabrication of soft X-ray blazed diffraction gratings
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Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60242N (2005) https://doi.org/10.1117/12.666970
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Diffraction gratings are designed for grazing-incidence operation in the soft x-ray spectral region. The efficiencies for various diffraction orders are simulated as a function of angle of incidence and blazed angles. According to the beat phenomenon, the grating pattern with double-frequency on the same substrate is recorded in a holographic way. The blazed grating will be fabricated using holography and ion beam etching method. The primary experimental results are presented. This kind of blazed grating is a key element used as a beam splitter of soft x-ray Mach-Zehnder interferometer, which is a new tool to diagnose the plasma generated by the laser-based inertial confinement fusion.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ying Liu, Xin Tan, Xiangdong Xu, Yilin Hong, Shaojun Fu, "Design and fabrication of soft X-ray blazed diffraction gratings", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242N (9 December 2005); doi: 10.1117/12.666970; https://doi.org/10.1117/12.666970


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