Design and fabrication of soft X-ray blazed diffraction gratings

Ying Liu; Xin Tan; Xiangdong Xu; Yilin Hong; Shaojun Fu

doi:10.1117/12.666970

9 December 2005 Design and fabrication of soft X-ray blazed diffraction gratings

Ying Liu; Xin Tan; Xiangdong Xu; Yilin Hong; Shaojun Fu

Author Affiliations +

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60242N (2005) https://doi.org/10.1117/12.666970
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Diffraction gratings are designed for grazing-incidence operation in the soft x-ray spectral region. The efficiencies for various diffraction orders are simulated as a function of angle of incidence and blazed angles. According to the beat phenomenon, the grating pattern with double-frequency on the same substrate is recorded in a holographic way. The blazed grating will be fabricated using holography and ion beam etching method. The primary experimental results are presented. This kind of blazed grating is a key element used as a beam splitter of soft x-ray Mach-Zehnder interferometer, which is a new tool to diagnose the plasma generated by the laser-based inertial confinement fusion.

Citation Download Citation

Ying Liu, Ying Liu, Xin Tan, Xin Tan, Xiangdong Xu, Xiangdong Xu, Yilin Hong, Yilin Hong, Shaojun Fu, Shaojun Fu, } "Design and fabrication of soft X-ray blazed diffraction gratings", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242N (9 December 2005); doi: 10.1117/12.666970; https://doi.org/10.1117/12.666970

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