Design and fabrication of soft X-ray blazed diffraction gratings

Ying Liu; Xin Tan; Xiangdong Xu; Yilin Hong; Shaojun Fu

doi:10.1117/12.666970

9 December 2005 Design and fabrication of soft X-ray blazed diffraction gratings

Ying Liu, Xin Tan, Xiangdong Xu, Yilin Hong, Shaojun Fu

Author Affiliations +

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60242N (2005) https://doi.org/10.1117/12.666970
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Diffraction gratings are designed for grazing-incidence operation in the soft x-ray spectral region. The efficiencies for various diffraction orders are simulated as a function of angle of incidence and blazed angles. According to the beat phenomenon, the grating pattern with double-frequency on the same substrate is recorded in a holographic way. The blazed grating will be fabricated using holography and ion beam etching method. The primary experimental results are presented. This kind of blazed grating is a key element used as a beam splitter of soft x-ray Mach-Zehnder interferometer, which is a new tool to diagnose the plasma generated by the laser-based inertial confinement fusion.

Citation Download Citation

Ying Liu, Ying Liu, Xin Tan, Xin Tan, Xiangdong Xu, Xiangdong Xu, Yilin Hong, Yilin Hong, Shaojun Fu, Shaojun Fu, "Design and fabrication of soft X-ray blazed diffraction gratings", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242N (9 December 2005); doi: 10.1117/12.666970; https://doi.org/10.1117/12.666970

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