Wave-front reconstruction for lateral shearing interferometers with big shear

Peiying Liang; Jianping Ding; Jin Zhou; Hui-tian Wang

doi:10.1117/12.667908

20 January 2006 Wave-front reconstruction for lateral shearing interferometers with big shear

Peiying Liang, Jianping Ding, Jin Zhou, Hui-tian Wang

Proceedings Volume 6027, ICO20: Optical Information Processing; 60270Q (2006) https://doi.org/10.1117/12.667908
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A novel algorithm is proposed to reconstruct two-dimensional wave-front from differential wave-fronts measured in shearing interferometer. Two 1-dimensional estimates of object wave-front are computed using Fourier transform from differential wave-fronts, and then the 2-dimensional wave-front distribution is derived by use of least-square fitting. The algorithm is applicable to cases in which the shear amount is larger than one sampling interval, and thus alleviates the limitation on the shear amount imposed by conventional algorithms. Investigations into reconstruction accuracy and reliability are carried out by computer simulation. Optical experiments are made in a lateral shearing interferometer based on double-grating, and 3-dimensional surface profile of optical element under test are measured and presented. The analysis and discussion are also given in the final part of this article.

Citation Download Citation

Peiying Liang, Jianping Ding, Jin Zhou, and Hui-tian Wang "Wave-front reconstruction for lateral shearing interferometers with big shear", Proc. SPIE 6027, ICO20: Optical Information Processing, 60270Q (20 January 2006); https://doi.org/10.1117/12.667908

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