21 December 2005 Study on a novel high-pressure micro-discharge configuration for micro-laser
Author Affiliations +
Proceedings Volume 6028, ICO20: Lasers and Laser Technologies; 60280H (2005) https://doi.org/10.1117/12.667134
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
A "plane cathode micro-hollow anode discharge"(PCMAD) device was researched on the base of the configuration of micro-hollow cathode discharge (MHCD). And a new discharge device was designed for forming large-volume plasmas, and its anode is metallic needle, and its cathode is PCMAD. It composed of a "needle-hole" sustained glow discharge. The discharge experiment was carried through with the air, and the stable direct-current glow discharge was formed in single PCMAD at pressure up to 760Torr, and multi-PCMAD can operate stably in parallel at pressure up to 500Torr without individual ballasting resistors. The dc voltage-current characteristics of these discharges showed a positive slope, and it had positive differential resistance coefficient. "Needle-hole" sustained glow discharge could also operate stably at pressure up to 500Torr to form large-volume high-current density glow discharge plasmas, and the electron density was estimated from 1011 cm-3 to 1012 cm-3 in the discharge plasmas. The total discharge current arrived to 300mA for the fifty "needle-hole" discharges operating stably, and the main discharge sustained voltage was approximately 1000V when the distance of between the needle and the hole was 20mm. The high-pressure, large-volume, high-current-density plasmas could be used the media of micro-laser. When the discharges gas was rare gas, the discharge plasmas would be used the media of the excimer laser. In addition, the configuration of the discharge device was simple and made easily. The experiment results show that the designed discharge device is appropriate for the micro-laser.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chao Jiang, Chao Jiang, Youqing Wang, Youqing Wang, "Study on a novel high-pressure micro-discharge configuration for micro-laser", Proc. SPIE 6028, ICO20: Lasers and Laser Technologies, 60280H (21 December 2005); doi: 10.1117/12.667134; https://doi.org/10.1117/12.667134
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Analysis of metal-metal contacts in RF MEMS switches
Proceedings of SPIE (March 08 2013)
Exposure Time: It Can Be Important
Proceedings of SPIE (February 28 1983)
High Power Lasers For Materials Processing
Proceedings of SPIE (May 17 1989)
XeCl Excimer Laser For Micro Machining Of Materials...
Proceedings of SPIE (October 18 1987)

Back to Top