Photonic micro and sub-micro structures in LiNbO<sub>3</sub> crystals

Pengfei Wang; G.G. Bentini; M. Bianconi; A. Cerutti; M. Chiarini; P. Mazzoldi; G. Pennestri; C. Sada; Lin She

doi:10.1117/12.667765

3 February 2006 Photonic micro and sub-micro structures in LiNbO₃ crystals

Pengfei Wang, G.G. Bentini, M. Bianconi, A. Cerutti, M. Chiarini, P. Mazzoldi, G. Pennestri, C. Sada, Lin She

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60291J (2006) https://doi.org/10.1117/12.667765
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

High energy lasers processing of materials is knowing an increasing interest since it not only can make manufacturing faster, cleaner, and more accurate but also because it opens up entirely new technologies and manufacturing methods, that are simply not available by using standard techniques. In this paper, an experimental set-up, based on pulsed KrF excimer Laser, assembled for surface patterning of mono and two-dimensional, (1D-2D), micro and submicro structures on LiNbO₃(LN) crystal, will be described in detail. The apparatus has been used to produce photonic structures in LN, both by patterning of PMMA photoresist, and by direct surface patterning through laser ablation or direct laser writing. The structures and properties of the photonic crystals fabricated by using this apparatus have been investigated, and the preliminary results will be presented.

Citation Download Citation

Pengfei Wang, G.G. Bentini, M. Bianconi, A. Cerutti, M. Chiarini, P. Mazzoldi, G. Pennestri, C. Sada, and Lin She "Photonic micro and sub-micro structures in LiNbO₃ crystals", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60291J (3 February 2006); https://doi.org/10.1117/12.667765

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available