2 February 2006 Integrated Mach-Zehnder micro-interferometer for gas trace remote sensing
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Proceedings Volume 6031, ICO20: Remote Sensing and Infrared Devices and Systems; 603106 (2006) https://doi.org/10.1117/12.667896
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides; the phase shift between the two optical paths has been obtained, without moving parts, by applying a suitable electric field. The whole device is 60mm long, has a 0.5x1mm2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4μm-1.1μm) will be presented. The performance of the device, evaluated on standard radiation sources, demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications, spanning from Space Technology, Earth observation for Environment monitoring, to Safety and Security applications.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Chiarini, G. G. Bentini, M. Bianconi, A. Cerutti, G. Pennestri, Pengfei Wang, Lin She, P. Mazzoldi, C. Sada, "Integrated Mach-Zehnder micro-interferometer for gas trace remote sensing", Proc. SPIE 6031, ICO20: Remote Sensing and Infrared Devices and Systems, 603106 (2 February 2006); doi: 10.1117/12.667896; https://doi.org/10.1117/12.667896

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