2 February 2006 Integrated Mach-Zehnder micro-interferometer for gas trace remote sensing
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Proceedings Volume 6031, ICO20: Remote Sensing and Infrared Devices and Systems; 603106 (2006) https://doi.org/10.1117/12.667896
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides; the phase shift between the two optical paths has been obtained, without moving parts, by applying a suitable electric field. The whole device is 60mm long, has a 0.5x1mm2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4μm-1.1μm) will be presented. The performance of the device, evaluated on standard radiation sources, demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications, spanning from Space Technology, Earth observation for Environment monitoring, to Safety and Security applications.
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M. Chiarini, G. G. Bentini, M. Bianconi, A. Cerutti, G. Pennestri, Pengfei Wang, Lin She, P. Mazzoldi, C. Sada, "Integrated Mach-Zehnder micro-interferometer for gas trace remote sensing", Proc. SPIE 6031, ICO20: Remote Sensing and Infrared Devices and Systems, 603106 (2 February 2006); doi: 10.1117/12.667896; https://doi.org/10.1117/12.667896
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