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Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film
Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes
Negative chemical amplification process simulation in integrated circuits and microelectromechanical systems fabrication
Study of lag effect in LPHD plasma etching of Si for MEMS applications by variable time steps in numerical methods
Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography
Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis
The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force