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Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film
Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes
Study of lag effect in LPHD plasma etching of Si for MEMS applications by variable time steps in numerical methods
Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography
The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force