7 February 2006 Design research of nanopositioner based on SPM and its simulation of FEM
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Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 603209 (2006) https://doi.org/10.1117/12.667854
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
A novel nanopositioning stage was designed according to the scanning property of SPM with flexure hinge as kinematic structure and piezoelectric ceramic as actuator. Kinetic precision and X directional area of nanopositioner are 1.55nm and 26.4 micron, respectively, which is demonstrated by kinetic analysis and finite element method FEM simulation. Designed nanopositioner based on SPM moves at 3 dimensions with nanometer scale and its motion of X, Y, and Z directions is decoupled and isotropic. Furthermore, frame of nanopositioner is simple and manufacturing is convenient, which will have broad prospect in the field of nanopositioning and nanotracing.
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Zhenyu Zhang, Hongqi Li, Hongxiu Zhou, Linan Li, Xiangjun Liu, "Design research of nanopositioner based on SPM and its simulation of FEM", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 603209 (7 February 2006); doi: 10.1117/12.667854; https://doi.org/10.1117/12.667854
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