Research on micro/nano film getters for vacuum maintenance of MEMS

Yufeng Jin; Ying Zhao

doi:10.1117/12.667858

7 February 2006 Research on micro/nano film getters for vacuum maintenance of MEMS

Yufeng Jin, Ying Zhao

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320B (2006) https://doi.org/10.1117/12.667858
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Vacuum packaging is very important for some micro-electro-mechanical systems (MEMS) devices to perform their basic functions properly and to enhance their reliability by keeping these devices away from harmful external environment. In order to maintain high vacuum in a cavity of MEMS devices, residual gases and leaking gases must be eliminated by getter materials embedded. This paper will report the fabrication and characterization of advanced getter, or micro/nano getters for MEMS applications.

Citation Download Citation

Yufeng Jin and Ying Zhao "Research on micro/nano film getters for vacuum maintenance of MEMS", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320B (7 February 2006); https://doi.org/10.1117/12.667858

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