7 February 2006 Fabrication of optical waveguide multilayer storage devices
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Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320D (2006) https://doi.org/10.1117/12.667860
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
The device of optical waveguide multilayer storage (WMS) consists of a stuck of slab optical waveguide. The guide waves are restricted within the addressed layer without leakage except for the defects where information is recorded. This phenomenon is employed in WMS for layer addressing and data reading to reduce the cross talk between layers. In this paper, we introduce the method of WMS device fabrication. The basic process includes writing data into monolayer waveguide and bonding the monolayers together as a multi-layers device. The method of data writing is based on the technique of conventional photolithography. To simplify the fabrication, an adhesive having refractive index lower than the core's is used as bonding material and functions as cladding medium as well. The bonding process by using RTV 615 silicone is described and the experimental observation of WMS device is demonstrated. The experimental results show that the described process is a feasible way to fabricate WMS device.
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Minfen Gu, Minfen Gu, Dongyan Ding, Dongyan Ding, Zhongcheng Liang, Zhongcheng Liang, Jiabi Chen, Jiabi Chen, Songlin Zhuang, Songlin Zhuang, "Fabrication of optical waveguide multilayer storage devices", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320D (7 February 2006); doi: 10.1117/12.667860; https://doi.org/10.1117/12.667860

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