7 February 2006 Theory and simulation of MEMS deformable mirror
Author Affiliations +
Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320J (2006) https://doi.org/10.1117/12.667868
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
A novel MEMS deformable mirror was proposed and characterized. Actuator deflection was simulated using one dimensional electromechanical model. The diaphragm was modeled as a double cantilever beam, with a gap-dependent electrostatic actuating force. The effect of the structural parameters and actuated voltages on the deflection of the actuator was closely studied. A lumped parameter model for predicting the reset transient motion of the actuator, taking into account tensile forces and viscous air damping via squeeze film theory, was used to determine the reset time. The results show that the elastic diaphragm thickness, the elastic diaphragm length and gap spacing have a strong effect on the deflection, the actuator displays typical nonlinear deflection versus voltage characteristics and electromechanical instability at elevated voltages. The reset transient motion of the actuator is an exponential decay oscillation line, the reset time is about 0.14μs.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinliang Yan, Jinliang Yan, Yinnv Zhao, Yinnv Zhao, Fen Yu, Fen Yu, Youliang Zhu, Youliang Zhu, Hongzhao Zhang, Hongzhao Zhang, } "Theory and simulation of MEMS deformable mirror", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320J (7 February 2006); doi: 10.1117/12.667868; https://doi.org/10.1117/12.667868


Back to Top