Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography

Xiaowei Guo; Mingyong Chen; Jianhua Zhu; Yanqin Ma; Jinglei Du; Yongkang Guo; Chunlei Du

doi:10.1117/12.667869

7 February 2006 Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography

Xiaowei Guo, Mingyong Chen, Jianhua Zhu, Yanqin Ma, Jinglei Du, Yongkang Guo, Chunlei Du

Author Affiliations +

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320K (2006) https://doi.org/10.1117/12.667869
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled digital-micromirror-device(DMD^TM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of etching SHSG with enzyme and theoretical analysis for deep etching are also discussed in detail, and the detailed quantitative experiments on the processing procedures are conducted to determine optimum technique parameters. A good linear relationship within a depth range of 4μm was experimentally obtained between exposure dose and relief depth. At last, the microlensarray with 256.8μm radius and 2.572μm depth was achieved. This method is simple, cheap and the aberration in processing procedures can be corrected in the step of designing mask, so it is a practical method to fabricate good continuous profile for low-volume production.

Citation Download Citation

Xiaowei Guo, Mingyong Chen, Jianhua Zhu, Yanqin Ma, Jinglei Du, Yongkang Guo, and Chunlei Du "Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320K (7 February 2006); https://doi.org/10.1117/12.667869

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