Interference characteristic analysis on RoF illumination

Xiaojun Cao; Jianqiang Zhu; Qiang Lin

doi:10.1117/12.668164

1 February 2006 Interference characteristic analysis on RoF illumination

Xiaojun Cao, Jianqiang Zhu, Qiang Lin

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 60341Q (2006) https://doi.org/10.1117/12.668164
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

The coherent artifacts have harmful influence on the measurement results and make the precision worse during the optical testing. Using RoF illumination method, we can get evener coherent artifacts on the interferogram, improve the gain in S/N ratio, and reduce the measurement error. In this paper we analyze the RoF illumination interferometer, compare the spatial coherence of the RoF and that of the quasi-point light source, get the intensity distribution of the interference field, obtain the fringe visibility, and make a further analysis of the result precision dependence on RoF radius and cavity length.

Citation Download Citation

Xiaojun Cao, Jianqiang Zhu, and Qiang Lin "Interference characteristic analysis on RoF illumination", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 60341Q (1 February 2006); https://doi.org/10.1117/12.668164

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