5 January 2006 Knowledge-based process simulation and design system for MEMS
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Abstract
A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process design, simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.
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J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger, "Knowledge-based process simulation and design system for MEMS", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603512 (5 January 2006); doi: 10.1117/12.638483; https://doi.org/10.1117/12.638483
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