5 January 2006 Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry
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Abstract
We present the design and fabrication methods for a piezoresistive pressure sensor intended for use in biomedical applications and in particular, pharyngeal manometry. Design requirements are investigated for the sensors size, pressure range and frequency response. The piezoresistive effect is investigated to determine the crystallographic orientation of the substrate and the position of the piezoresistive elements on the surface of the chip. A design calculation method is derived, and a design approach is proposed that satisfy the requirements of the application. Finally a brief description is given of the fabrication processing steps that could be utilised to realise this design.
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Richard L. Petty, Alex J. Hariz, "Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603522 (5 January 2006); doi: 10.1117/12.641109; https://doi.org/10.1117/12.641109
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