19 January 2006 Conception and design of a thermal valveless micropump
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Abstract
This paper describes the conception and design of a micropump for gas, with no moving or deformable parts, for use on the future sensor network system, which includes environment monitoring. This design is original because of the complete absence of moving parts for the pumping of gas. In fact, fluid movement was obtained by means of repetitive heating and cooling cycles of the gas, in the pump chamber. The prototyping work is on going and the first results are presented with particular emphasis on thermal characterization.
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G. Manzoni, G. Manzoni, S. Heisig, S. Heisig, T. Takano, T. Takano, C. Kocer, C. Kocer, H. Goto, H. Goto, T. Mihara, T. Mihara, R. Maeda, R. Maeda, } "Conception and design of a thermal valveless micropump", Proc. SPIE 6036, BioMEMS and Nanotechnology II, 60360I (19 January 2006); doi: 10.1117/12.638467; https://doi.org/10.1117/12.638467
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