28 December 2005 Improving the sensitivity of biosensor by use of the Ag and SiO2 films
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Abstract
For improving the sensitivity of a SPR biosensor, we proposed a new combination of the thin silver (Ag) and SiO2 films, and used the common-path heterodyne interferometry. Although the Ag film has higher sensitivity than the gold (Au) film1, but Ag has toxicity for many media and it is easy to be oxidized. In order to enhance the sensitivity and protect the tested medium not to directly contact with Ag, we selected a coating of SiO2 on the Ag film for the reason of it is cheaper and easy to obtain. The simulations and experimental results are shown that its best resolution could reach to the value of 6.9×10-9RIU.
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Ling-Chih Kao, Ming-Hung Chiu, Bo-Yuan Shih, Chih-Hsien Shih, Cheng-Ru Tsai, Fuh-Shyang Juang, "Improving the sensitivity of biosensor by use of the Ag and SiO2 films", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60370W (28 December 2005); doi: 10.1117/12.637735; https://doi.org/10.1117/12.637735
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