3 January 2006 Optical scanning devices based on PZT thick films formed by aerosol deposition method
Author Affiliations +
Abstract
High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jae-Hyuk Park, Jae-Hyuk Park, Jun Akedo, Jun Akedo, Maxim Lebedev, Maxim Lebedev, Harumichi Sato, Harumichi Sato, } "Optical scanning devices based on PZT thick films formed by aerosol deposition method", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371S (3 January 2006); doi: 10.1117/12.638489; https://doi.org/10.1117/12.638489
PROCEEDINGS
6 PAGES


SHARE
Back to Top