3 January 2006 Optical scanning devices based on PZT thick films formed by aerosol deposition method
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Abstract
High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.
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Jae-Hyuk Park, Jae-Hyuk Park, Jun Akedo, Jun Akedo, Maxim Lebedev, Maxim Lebedev, Harumichi Sato, Harumichi Sato, "Optical scanning devices based on PZT thick films formed by aerosol deposition method", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371S (3 January 2006); doi: 10.1117/12.638489; https://doi.org/10.1117/12.638489
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