Translator Disclaimer
18 January 2006 Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching
Author Affiliations +
Abstract
Electro-optical channel waveguide is fabricated using an optical nonlinear polymer developed by doping dye organic molecules in a host polymer system and followed by an electric field poling step. A single-mode polymeric electrooptical channel waveguide is modeled using the BeamProp. Photolithography followed by wet chemical etching is used to fabricate the polymeric channel waveguide. A fabrication process is described. Results from a systematic evaluation of the film and waveguide physical and optical properties using AFM, profilometer, ellipsometer and the Maker Fringe technique is presented.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin Le, Ping Zhang, Hans Hu, and J.-C. Chiao "Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching", Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 60381Q (18 January 2006); https://doi.org/10.1117/12.638302
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top