Numerical simulation of self-organized nano-islands in plasma-based assembly of quantum dot arrays

I. Levchenko; K. Ostrikov

doi:10.1117/12.638237

18 January 2006 Numerical simulation of self-organized nano-islands in plasma-based assembly of quantum dot arrays

I. Levchenko, K. Ostrikov

Proceedings Volume 6039, Complex Systems; 60390L (2006) https://doi.org/10.1117/12.638237
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

This work presents the details of the numerical model used in simulation of self-organization of nano-islands on solid surfaces in plasma-assisted assembly of quantum dot structures. The model includes the near-substrate non-neutral layer (plasma sheath) and a nanostructured solid deposition surface and accounts for the incoming flux of and energy of ions from the plasma, surface temperature-controlled adatom migration about the surface, adatom collisions with other adatoms and nano-islands, adatom inflow to the growing nano-islands from the plasma and from the two-dimensional vapour on the surface, and particle evaporation to the ambient space and two-dimensional vapour. The differences in surface concentrations of adatoms in different areas within the quantum dot pattern significantly affect the self-organization of the nano-islands. The model allows one to formulate the conditions when certain islands grow, and certain ones shrink or even dissolve and relate them to the process control parameters. Surface coverage by self-organized quantum dots obtained from numerical simulation appears to be in reasonable agreement with the available experimental results.

Citation Download Citation

I. Levchenko and K. Ostrikov "Numerical simulation of self-organized nano-islands in plasma-based assembly of quantum dot arrays", Proc. SPIE 6039, Complex Systems, 60390L (18 January 2006); https://doi.org/10.1117/12.638237

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