21 March 2006 Coupling terms analysis for a 3-DOF parallel compliant mechanism
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Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 60400D (2006) https://doi.org/10.1117/12.664147
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
The input coupling term is one of the important factor need to be considered in designing a precision micro-positioning mechanism. Couplings between the input bodies will cause a serious difficulty in motion control. An input coupled terms analysis method was presented for a 3-DOF micro-positioning parallel compliant mechanism. Firstly, the pseudo-rigid-body model of the mechanism was presented, an input coupled terms prediction method was developed based on the linearization theory. Secondly, using the finite element method validated the prediction method. Finally, the influences of the structural parameters to the input coupled terms were discussed. The results are helpful to design a low input coupling terms micro-positioning system.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianmin Zhang, Xianmin Zhang, Wang Hua, Wang Hua, } "Coupling terms analysis for a 3-DOF parallel compliant mechanism", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 60400D (21 March 2006); doi: 10.1117/12.664147; https://doi.org/10.1117/12.664147

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