Research on terminal behavior of electrostatically actuated micropump membrane based on modal analysis

Xiezhao Lin; - Jiying; Zichen Chen

doi:10.1117/12.664174

21 March 2006 Research on terminal behavior of electrostatically an actuated micropump membrane based on modal analysis

Xiezhao Lin, - Jiying, Zichen Chen

Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 60400U (2006) https://doi.org/10.1117/12.664174
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

For optimizing the performance of the electrostatically actuated micropump, a multi-terminal behavior model of a micropump membrane is constructed by a modal projection technique. The dynamic state of the membrane is represented by a weighted combination of a few eigenmodes, which was obtained by using commercial finite element analysis programs ANSYS^TM. By the data extraction technology, the capacitance of electrostatic excitation and membrane strain energy can be represented in modal coordinates. For considering the fluidic damping impact on the mode natural frequency and mode shape, the pump flow was treated as an additional mass attaching to the membrane. The pumping flow rate can be calculated by integrating the deformation profile function over the membrane's area. As a result, the terminal behavior model of membrane can be formulated in a set of ordinary differential algebraic equations, which is suitable for system level simulation. Finally, the dynamic behavior of a membrane was investigated.

Citation Download Citation

Xiezhao Lin, - Jiying, and Zichen Chen "Research on terminal behavior of electrostatically an actuated micropump membrane based on modal analysis", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 60400U (21 March 2006); https://doi.org/10.1117/12.664174

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