The design and simulation of a practical micromachined relay

Liuqiang Zhang; Dawei Den; Qiang Wang; Jianeng Wang; Zhiyu Wen

doi:10.1117/12.664185

21 March 2006 The design and simulation of a practical micromachined relay

Liuqiang Zhang, Dawei Den, Qiang Wang, Jianeng Wang, Zhiyu Wen

Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 604013 (2006) https://doi.org/10.1117/12.664185
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

A practical micromachined relay, i.e. bistable electromagnetic micromachined relay, was proposed. The relay made up of three parts: movable electrode plate, plane coil chip and permanent magnet plate, which are fabricated respectively and assembled together finally. The simulation was performed for the electromagnetic field and electromagnetic force of the micromachined relay as well as the statics and harmonic response of the movable electrode. Based on the simulation results, the structure design of the relay was optimized, and the performance of the relay is evaluated.

Citation Download Citation

Liuqiang Zhang, Dawei Den, Qiang Wang, Jianeng Wang, and Zhiyu Wen "The design and simulation of a practical micromachined relay", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604013 (21 March 2006); https://doi.org/10.1117/12.664185

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