21 March 2006 The establishment of the virtual machine for nanometer drive parts under large feeding force and its actuation characteristic research
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Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 604017 (2006); doi: 10.1117/12.664189
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
On the basis of the research on nanometer drive parts under large feeding force, and according to the thermal expansion principle, the nano precision drive part based on the semiconductor refrigeration equipment was designed. In order to simulink the process of the nanometer drive parts under large feeding force and optimize the parameter of the drive part with different materials and different working conditions, a new method to establish the virtual machine for nanometer drive parts under large feeding force is presented. Firstly, the virtual machine for nanometer drive parts under large feeding force is established by using heat conduction differential equation and its finite difference technology, then, an experimental platform is constructed which constitutes of nanometer drive parts, the pressure installment, high precision inductance measures, WS16DP sampling card, computer and power amplifier. Finally, the actuation characteristic research on nanometer drive parts under large feeding force will be done on the experimental platform by virtual machine. Experiments show that the virtual machine established in this paper conforms to the physical machine.
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Xuxiao Hu, Dong Ji, "The establishment of the virtual machine for nanometer drive parts under large feeding force and its actuation characteristic research", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604017 (21 March 2006); doi: 10.1117/12.664189; https://doi.org/10.1117/12.664189
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KEYWORDS
Semiconductors

Convection

Copper

Differential equations

Inductance

Amplifiers

Magnetostrictive materials

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