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21 March 2006 Nano hardness measurements of single crystal silica (Si) by an easy new technique
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Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 60401J (2006) https://doi.org/10.1117/12.664225
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
Nano-Hardness is commonly defined as a materials resistance to permanent or plastic deformation at the nano-micro level. Nano Hardness is a significant mechanical properties of materials commonly used to characterize the wear resistance of materials. In this present paper, a procedure is developed for calculation of nano hardness by use of nano indentation and an Atomic Force Microscope (A.F.M). For the indentation experiment a three sided pyramidal diamond tip has been used. Experiment have been concluded on single crystal Silica ( Si ) . At room temperature nano hardness properties of single crystal Si have been investigated at dissimilar indentation loads. Inorder to obtain the nanoindentation hardness of single crystal Silica , the load displacement data have been used. After the indentation, the indentational images were observed by AFM. The images were triangle shape and the sides of triangle were measured by AFM for area calculation. Comparison of the data obtained using nano indenter with that obtained by using new technique was shown. It has been concluded from the results that the measured nano hardness values of the material sensitively depend on the applied load of indentation and surface roughness. It is also concluded that the calculated nano hardness is smaller than nano indenter hardness which indicates the calculated area is bigger than indentational area.
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Shahjada Ahmed Pahlovy, Sadao Momota, and Yao Ying Xue "Nano hardness measurements of single crystal silica (Si) by an easy new technique", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 60401J (21 March 2006); https://doi.org/10.1117/12.664225
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