Paper
20 February 2006 Research on the step by step fitting method of multi-order exponential function
Xuxiao Hu, Zhihua Gu
Author Affiliations +
Proceedings Volume 6041, ICMIT 2005: Information Systems and Signal Processing; 60411S (2006) https://doi.org/10.1117/12.664347
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
In order to establish the mathematical model of nanometer drive parts having large feeding force, the relation between input power and output displacement is analyzed, a step by step fitting method is presented for multi-order exponential function. For exponential function with different parameter time has different balance time, the last part is firstly fitted, and there are two restrictions must be considered, first, the error between the last fitting curve and the experimental sample point is as small as possible, second, error between fitting and experimental in the frontal part is accord with a exponential function and then using the same method different constant time and corresponding amplitude of the exponential function re fitted step by step. The methods presented in this paper was used to fit the nanometer drive parts under 5000N feeding force, the fitting precision between input power and output displacement can reach 0.5%.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuxiao Hu and Zhihua Gu "Research on the step by step fitting method of multi-order exponential function", Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411S (20 February 2006); https://doi.org/10.1117/12.664347
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KEYWORDS
Mathematical modeling

Error analysis

Semiconductors

Inductance

Differential equations

Metals

Picosecond phenomena

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