2 May 2006 Applications of colored petri net and genetic algorithms to cluster tool scheduling
Author Affiliations +
Proceedings Volume 6042, ICMIT 2005: Control Systems and Robotics; 60420Q (2006) https://doi.org/10.1117/12.664566
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China
Abstract
In this paper, we propose a method, which uses Coloured Petri Net (CPN) and genetic algorithm (GA) to obtain an optimal deadlock-free schedule and to solve re-entrant problem for the flexible process of the cluster tool. The process of the cluster tool for producing a wafer usually can be classified into three types: 1) sequential process, 2) parallel process, and 3) sequential parallel process. But these processes are not economical enough to produce a variety of wafers in small volume. Therefore, this paper will propose the flexible process where the operations of fabricating wafers are randomly arranged to achieve the best utilization of the cluster tool. However, the flexible process may have deadlock and re-entrant problems which can be detected by CPN. On the other hand, GAs have been applied to find the optimal schedule for many types of manufacturing processes. Therefore, we successfully integrate CPN and GAs to obtain an optimal schedule with the deadlock and re-entrant problems for the flexible process of the cluster tool.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tung-Kuan Liu, Tung-Kuan Liu, Chih-Jen Kuo, Chih-Jen Kuo, Yung-Chin Hsiao, Yung-Chin Hsiao, Jinn-Tsong Tsai, Jinn-Tsong Tsai, Jyh-Horng Chou, Jyh-Horng Chou, } "Applications of colored petri net and genetic algorithms to cluster tool scheduling", Proc. SPIE 6042, ICMIT 2005: Control Systems and Robotics, 60420Q (2 May 2006); doi: 10.1117/12.664566; https://doi.org/10.1117/12.664566
PROCEEDINGS
6 PAGES


SHARE
Back to Top