LMI based robust <i>H</i>&#8734; control theory for nanofeeding under large feeding force

Xuxiao Hu; Dong Ji

doi:10.1117/12.664676

2 May 2006 LMI based robust H∞ control theory for nanofeeding under large feeding force

Xuxiao Hu, Dong Ji

Proceedings Volume 6042, ICMIT 2005: Control Systems and Robotics; 60422T (2006) https://doi.org/10.1117/12.664676
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

On the basis of the research on nanometer drive parts under large feeding force and the thermal expansion principle, the nano precision drive parts based on the semiconductor refrigeration equipment was designed. In order to get a better feed precision, considering that the nano feeding under large feeding force has some open air temperature random disturbance phenomenon which influence the feed precision, LMI-based robust H∞ control scheme was presented. And the LMI-based robust H∞ control scheme used here can realize the purpose of obtaining a good control of nano feeding under large feeding to enhance the response speed and the robustness. When the open air temperature changes within 0.3°C, the control precision without LMI-based robust H∞ control scheme is 15 nm and the control precision under LMI-based robust H∞ control scheme has arrived within 10 nm. This proves the LMI-based robust H∞ control feasible and usable.

Citation Download Citation

Xuxiao Hu and Dong Ji "LMI based robust H∞ control theory for nanofeeding under large feeding force", Proc. SPIE 6042, ICMIT 2005: Control Systems and Robotics, 60422T (2 May 2006); https://doi.org/10.1117/12.664676

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