5 December 2005 Tribological and micro-optical characteristics of a minute aperture mounted miniaturized optical head slider
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Proceedings Volume 6050, Optomechatronic Micro/Nano Devices and Components; 60500C (2005) https://doi.org/10.1117/12.648823
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan
Recent rapid progress in a digital network society necessitates storage devices with higher-density and faster transfer rates. In optical storage, a novel recording principle is eagerly awaited that will drastically improve recording density without being restricted by a wavelength shortening limit or a numerical aperture (N.A.) limit of the optics utilized. Storage based on the "near-field" principle is thought to be one of the most promising breakthroughs for overcoming various tough limitations governing traditional optical recording. From this perspective, we have already proposed an integrated optical head slider assembly that relies on the novel near-field principle for its operation; it is mounted on a minute tapered aperture and has a planar focusing lens and a micro silicon mirror. Readout signals corresponding to a 200-nm-long bit have demonstrated a frequency band up to approximately 10 MHz, using a chromium patterned medium. In this study, we have investigated a tribological (glide height) property and flying stability of a miniaturized 1.5-mm-long optical head slider by using acoustic emission sensor signal and readout signal from the medium. We have also evaluated detecting performance separately using traditional 3.2-mm-long slider and a chromium patterned medium whose bit patterns are accurately scored with bit lengths less than 100 nm using electron beam lithography including reactive ion etching. We have confirmed stable flying performance of 1.5-mm-long slider assembly and furthermore, ability of detecting sub-100-nm long bit patterns.
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Toshifumi Ohkubo, Toshifumi Ohkubo, Masakazu Hirata, Masakazu Hirata, Manabu Oumi, Manabu Oumi, Kunio Nakajima, Kunio Nakajima, Terunao Hirota, Terunao Hirota, } "Tribological and micro-optical characteristics of a minute aperture mounted miniaturized optical head slider", Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 60500C (5 December 2005); doi: 10.1117/12.648823; https://doi.org/10.1117/12.648823

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