6 December 2005 Non-contact measuring system in sinusoidal phase modulating interferometry using a laser diode
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Proceedings Volume 6051, Optomechatronic Machine Vision; 60510H (2005) https://doi.org/10.1117/12.649086
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan
Recently, laser interferometry is widely used as a measuring system in many fields because of its high resolution and its ability to measure a broad area in real-time all at once. In conventional laser interferometry, for example Out-of-plane ESPI (Electronic Speckle Pattern Interferometry), In plane ESPI, Shearography and Holography, it uses PZT or other components as a phase shift instrumentation to extract 3-D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of laser interferometry using a laser diode is proposed. Using Laser Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the laser diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact.
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Ki-Young Pyo, Ki-Young Pyo, Geun-Young Lee, Geun-Young Lee, Weon-Jae Ryu, Weon-Jae Ryu, Young-June Kang, Young-June Kang, Nak-Kyu Park, Nak-Kyu Park, } "Non-contact measuring system in sinusoidal phase modulating interferometry using a laser diode", Proc. SPIE 6051, Optomechatronic Machine Vision, 60510H (6 December 2005); doi: 10.1117/12.649086; https://doi.org/10.1117/12.649086

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