Replication of a sinusoidal grid surface by hot embossing and UV-casting

Naoya Tsurumi; Wei Gao; Akihide Kimura; Satoshi Kiyono

doi:10.1117/12.648300

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6 December 2005 Replication of a sinusoidal grid surface by hot embossing and UV-casting

Naoya Tsurumi; Wei Gao; Akihide Kimura; Satoshi Kiyono

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Proceedings Volume 6052, Optomechatronic Systems Control; 60520P (2005) https://doi.org/10.1117/12.648300
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the grid surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths of a hundred micrometers and amplitudes of a hundred nanometers. The master surface is fabricated on a diamond turning machine equipped with a fast tool servo. Two kinds of replication methods, the hot embossing and UV casting are employed for replicating the grid surface on polymer materials. The replication on a glass plate is also carried out by UV-casting. The replication systems and some experimental results are presented.

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Naoya Tsurumi, Wei Gao, Akihide Kimura, and Satoshi Kiyono "Replication of a sinusoidal grid surface by hot embossing and UV-casting", Proc. SPIE 6052, Optomechatronic Systems Control, 60520P (6 December 2005); https://doi.org/10.1117/12.648300

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