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6 December 2005 A micro-angle sensor based on laser autocollimation
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Proceedings Volume 6052, Optomechatronic Systems Control; 60520Q (2005)
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan
This paper describes a micro-angle sensor based on laser autocollimation. The sensor consists of a light source, an objective lens and a positioning-sensing device. The position-sensing photodetector, which is a quadrant photodiode, is placed at the focal position of the objective lens. Differing from a conventional autocollimator, the angle sensor employs a laser diode as the light source. The laser beam is collimated to a thin parallel beam with a diameter of 1 mm so that the angle sensor can be used to detect the surface local slope of a specimen. The thin laser beam also makes it possible to use a small target mirror for measurement of stage angular error motions. Because the sensitivity of angle detection does not depend on the focal length of the objective lens by using a laser source, an objective lens with a short focal length is employed for realizing a compact sensor size. The prototype micro-angle sensor has a dimension of 26mm x 22mm x 12 mm. The resolution is better than 0.1 arc-seconds. Optical design and experimental results of confirming the performance of the sensor are presented.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yusuke Saito, Wei Gao, and Satoshi Kiyono "A micro-angle sensor based on laser autocollimation", Proc. SPIE 6052, Optomechatronic Systems Control, 60520Q (6 December 2005);

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