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6 December 2005 Optical design of a double pass surface encoder
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Proceedings Volume 6052, Optomechatronic Systems Control; 60520R (2005)
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan
This paper describes the optical design of a new type surface encoder, which consists of a 2D angle grid and a 2D slope sensor for 2D position detection. The sensitivity of the new type surface encoder is two times higher than that of a conventional surface encoder through employing a double pass. A wave optical model of the surface encoder is established for the optical design. Simulations based on the wave optical model are carried out to analyze the behavior of the diffraction pattern on the photo-detector of the slope sensor. Basic experiments are also carried out to confirm the feasibility of the double pass surface encoder.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoji Watanabe, Wei Gao, Hiroki Shimizu, and Satoshi Kiyono "Optical design of a double pass surface encoder", Proc. SPIE 6052, Optomechatronic Systems Control, 60520R (6 December 2005);

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