Dependence of plasma resistance on time in electro-discharge excimer lasers

S. Anufrik; A. Volodenkov; K. Znosko

doi:10.1117/12.660061

9 June 2006 Dependence of plasma resistance on time in electro-discharge excimer lasers

S. Anufrik, A. Volodenkov, K. Znosko

Proceedings Volume 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications; 60530C (2006) https://doi.org/10.1117/12.660061
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation

Abstract

The dependence of resistance of a discharge on time is discussed in this work. The linearized effective ionization coefficient near breakdown voltage is introduced. It is shown, that the time of a discharge formation depends only on the square under a curve of a dimensionless overvoltage on a discharge gap, instead of from its curve shape.

Citation Download Citation

S. Anufrik, A. Volodenkov, and K. Znosko "Dependence of plasma resistance on time in electro-discharge excimer lasers", Proc. SPIE 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications, 60530C (9 June 2006); https://doi.org/10.1117/12.660061

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