Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser

V. D. Zvorykin; V. G. Bakaev; R. V. Gaynutdinov; A. O. Levchenko; S. I. Sagitov; P. B. Sergeev; D. B. Stavrovskii; N. N. Ustinovskii

doi:10.1117/12.660321

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9 June 2006 Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser

V. D. Zvorykin, V. G. Bakaev, R. V. Gaynutdinov, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, N. N. Ustinovskii

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Proceedings Volume 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications; 60530M (2006) https://doi.org/10.1117/12.660321
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation

Abstract

Fluorine-resistant coatings for fused silica windows of high-energy KrF lasers with damage thresholds as high as 20 J/cm² have been developed using two comparative deposition techniques: ion-assisted e-beam evaporation and magnetron ion sputtering. They were evaluated by means of atomic-force microscopy, Fourier spectroscopy, and laser-damage testing in large irradiated spots ~ 1 cm at powerful GARPUN KrF laser.

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V. D. Zvorykin, V. G. Bakaev, R. V. Gaynutdinov, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, and N. N. Ustinovskii "Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser", Proc. SPIE 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications, 60530M (9 June 2006); https://doi.org/10.1117/12.660321

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