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9 June 2006 Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser
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Proceedings Volume 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications; 60530M (2006) https://doi.org/10.1117/12.660321
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation
Abstract
Fluorine-resistant coatings for fused silica windows of high-energy KrF lasers with damage thresholds as high as 20 J/cm2 have been developed using two comparative deposition techniques: ion-assisted e-beam evaporation and magnetron ion sputtering. They were evaluated by means of atomic-force microscopy, Fourier spectroscopy, and laser-damage testing in large irradiated spots ~ 1 cm at powerful GARPUN KrF laser.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. D. Zvorykin, V. G. Bakaev, R. V. Gaynutdinov, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, and N. N. Ustinovskii "Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser", Proc. SPIE 6053, International Conference on Lasers, Applications, and Technologies 2005: High-Power Lasers and Applications, 60530M (9 June 2006); https://doi.org/10.1117/12.660321
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