6 February 2006 An optical and potential dual-image CMOS sensor for bioscientific applications
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Abstract
We have fabricated a CMOS image sensor which can simultaneously capture optical and on-chip potential images. The target applications of the sensor are; 1) on-chip DNA (and other biomolecular) sensing and 2) on-chip neural cell imaging. The sensor was fabricated using a 0.35μm 2-poly, 4-metals standard CMOS process. The sensor has a pixel array that consists of alternatively aligned optical sensing pixels (88×144) and potential sensing pixels (88×144). The total size of the array is QCIF (176×144). The size of the pixel is 7.5μm×7.5μm. The potential sensing pixel has a sensing electrode which capacitively couples with the measurement target on the sensor. It can be operated either in a wide-range (over 5V) mode or in a high-sensitivity (1.6mV/LSB) mode. Two-dimensional optical and potential imaging function was also demonstrated. Probes with gel tips were placed on the sensor surface and potential was applied. A potential spot with diameter smaller than 50μm was successfully observed in the dual imaging operation.
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Takashi Tokuda, Akio Yamamoto, Keiichiro Kagawa, Masahiro Nunoshita, Jun Ohta, "An optical and potential dual-image CMOS sensor for bioscientific applications", Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 606802 (6 February 2006); doi: 10.1117/12.642559; https://doi.org/10.1117/12.642559
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