A new direct detection camera system for electron microscopy

Shengdong Li; James Bouwer; Fred Duttweiler; Mark Ellisman; Liang Jin; Phillip Leblanc; Anna Milazzo; Steve Peltier; Nguyen Xuong; Stuart Kleinfelder

doi:10.1117/12.650673

6 February 2006 A new direct detection camera system for electron microscopy

Shengdong Li, James Bouwer, Fred Duttweiler, Mark Ellisman, Liang Jin, Phillip Leblanc, Anna Milazzo, Steve Peltier, Nguyen Xuong, Stuart Kleinfelder

Author Affiliations +

Proceedings Volume 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII; 60680O (2006) https://doi.org/10.1117/12.650673
Event: Electronic Imaging 2006, 2006, San Jose, California, United States

Abstract

High resolution electron imaging is very important in nanotechnology and biotechnology fields. For example, Cryogenic Electron-Microscopy is a promising method to obtain 3-D structures of large protein complexes and viruses. We report on the design and measurements of a new CMOS direct-detection camera system for electron imaging. The active pixel sensor array that we report on includes 512 by 550 pixels, each 5 by 5 μm in size, with an ~8 μm epitaxial layer to achieve an effective fill factor of 100%. Spatial resolution of 2.3 μm for a single incident e- has been measured. Electron microscope tests have been performed with 200 and 300 keV beams, and the first recorded Electron Microscope image is presented.

Citation Download Citation

Shengdong Li, James Bouwer, Fred Duttweiler, Mark Ellisman, Liang Jin, Phillip Leblanc, Anna Milazzo, Steve Peltier, Nguyen Xuong, and Stuart Kleinfelder "A new direct detection camera system for electron microscopy", Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 60680O (6 February 2006); https://doi.org/10.1117/12.650673

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