Portable optical microscope-on-a-chip

Xiquan Cui; Xin Heng; David Erickson; Demetri Psaltis; Changhuei Yang

doi:10.1117/12.640328

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28 February 2006 Portable optical microscope-on-a-chip

Xiquan Cui; Xin Heng; David Erickson; Demetri Psaltis; Changhuei Yang

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Proceedings Volume 6095, Nanobiophotonics and Biomedical Applications III; 609509 (2006) https://doi.org/10.1117/12.640328
Event: SPIE BiOS, 2006, San Jose, California, United States

Abstract

In this paper, we present a novel high resolution optical imaging device on chip. It is based on a line of nano holes defined in an optically opaque aluminum film on a CMOS imaging sensor chip. Because it's free of bulky optical elements and compatible to the planar micro fabrication process, it is very promising to become an important component for the on-chip high resolution imaging in the future. The fabrication and operation of this novel on-chip microscope is explained in details. The performance is evaluated theoretically and is verified experimentally by examining the profile of a laser spot formed by a 10X objective lens.

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Xiquan Cui, Xin Heng, David Erickson, Demetri Psaltis, and Changhuei Yang "Portable optical microscope-on-a-chip", Proc. SPIE 6095, Nanobiophotonics and Biomedical Applications III, 609509 (28 February 2006); https://doi.org/10.1117/12.640328

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