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28 February 2006 High-power Q-switched TEM00 mode diode-pumped solid state lasers with > 30W output power at 355nm
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Since their first commercial introduction in 1997, diode-pumped Q-switched vanadate and YAG lasers with 355nm output have advanced in power level and reliability and are now qualified in many industrial processes, such as via hole drilling, stereo lithography, wafer scribing and dicing. At present, average output power of up to 20W at 355nm are commercially available with pulse energies of several hundred micro-Joules and pulse repetition rates of up to 150 kHz. In this paper, we report high power UV generation with TEM00 mode output powers in excess of 30W in Q-switched, end-pumped Nd:YVO4 and side-pumped Nd:YAG lasers using extra-cavity sum frequency generation in LBO. With a side-pumped dual-rod Nd:YAG rod oscillator and extra-cavity tripling, 32W output power at 355nm have been achieved at a repetition rate of 50 kHz. With an end-pumped vanadate MOPA configuration, UV average power of 36W with TEM00 mode was realized at repetition rates around 100 kHz. Lifetest results are presented and the scaling to higher UV power of more than 60W is discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles X. Wang, Gary Y. Wang, Acle V. Hicks, David R. Dudley, Henry Y. Pang, and Norman Hodgson "High-power Q-switched TEM00 mode diode-pumped solid state lasers with > 30W output power at 355nm", Proc. SPIE 6100, Solid State Lasers XV: Technology and Devices, 610019 (28 February 2006);


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