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1 March 2006 Generation of new nanomaterials by interfering femtosecond laser processing and its applications
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Abstract
New nanomaterials such as nanobump, nanomesh, nanobelt were generated by thin film processing by interfering femtosecond laser beams. To split and correlate femtosecond laser, a demagnification optical system with a transmission beam splitter was used. Different interference patterns can be generated depending upon the number of beam, magnification factor and period of the transmission grating. Using the system, a material surface can be processed according to the interference pattern. Metallic single- or multi-layered film was used as a target. A nanobump array was applied to field emission device. In addition, periodic structure could be generated inside transparent material in a single process. This scheme is a new technique to generate new nanomaterials and nanostructures using top-down technique.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshiki Nakata "Generation of new nanomaterials by interfering femtosecond laser processing and its applications", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060M (1 March 2006); https://doi.org/10.1117/12.655159
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