The cross-beam pulsed laser deposition

Andre Gorbunoff

doi:10.1117/12.657108

1 March 2006 The cross-beam pulsed laser deposition

Andre Gorbunoff

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060U (2006) https://doi.org/10.1117/12.657108
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Due to hyperthermal particle energies, extremely high pulse deposition, and quenching rates the pulsed laser deposition (PLD) lies apart from all the other known deposition methods. The paper reviews the peculiarities of the cross-beam PLD (CBPLD), one of the most effective variant of high vacuum PLD with colliding ablation plumes. In addition to the reliable reduction of any form of macroparticle contamination it allows the fabrication of films with unexpected crystalline structure and unique physical properties, making the CBPLD a unique hyperthermal energy deposition technique.

Citation Download Citation

Andre Gorbunoff "The cross-beam pulsed laser deposition", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060U (1 March 2006); https://doi.org/10.1117/12.657108

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