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1 March 2006 A study of angular dependence in the ablation rate of polymers by nanosecond pulses
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Abstract
Measurements of ablation rate have traditionally been carried out only at normal incidence. However, in real-world applications ablation is often carried out at oblique angles, and it is useful to have prior knowledge of the ablation rate in this case. Detailed information about the angular dependence is also important for the development of ablation simulation tools, and can provide additional insight into the ablation mechanism. Previously we have reported on the angular dependence of direct-write ablation at 266 nm wavelength in solgel and polymer materials. In this paper we present a systematic study of angular dependence for excimer laser ablation of two polymer materials of interest for microfabrication: polycarbonate and SU8 photoresist. The results are used to improve simulation models to aid in mask design.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James E. A. Pedder and Andrew S. Holmes "A study of angular dependence in the ablation rate of polymers by nanosecond pulses", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061B (1 March 2006); https://doi.org/10.1117/12.659793
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