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1 March 2006 Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation
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Abstract
Various ablation processes including melt expulsion and debris deposition are demonstrated for intense laser ablation of bulk crystalline Si samples and thin copper films at different laser fluences by single tightly and multiple loosely focused laser pulses, respectively. Implications of our results to high-intensity femtosecond laser nano- and micro-machining of solids are discussed.
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Sergey I. Kudryashov "Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061C (1 March 2006); https://doi.org/10.1117/12.647146
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